Biblioteca Digital do Instituto Politécnico de Bragança   Instituto Politécnico de Bragança

Biblioteca Digital do IPB >
Escola Superior de Tecnologia e Gestão >
Tecnologia Química e Biológica >
DTQB - Artigos em Revistas Indexados ao ISI >

Please use this identifier to cite or link to this item: http://hdl.handle.net/10198/1360

Título: A new OMCVD iridium precursor for thin film deposition
Autor: Serp, Philippe
Feurer, Roselyne
Kalck, Philippe
Gomes, Helder
Faria, Joaquim
Figueiredo, José
Issue Date: 2001
Editora: Wiley
Citação: Serp, Philippe; Feurer, Roselyne; Kalck, Philippe; Gomes, Helder; Faria, Joaquim; Figueiredo, José (2001) - A new OMCVD iridium precursor for thin film deposition. Chemical Vapor Deposition. ISSN 0948-1907. 7:2 p.59-62
Resumo: A new one step synthesis of a volatile iridium OMCVD precursor with 60 % yield is described. Using the precursor [Ir(-SC(CH3)3)(CO)2]2 (see Figure), it is possible to obtain iridium of high purity. TGA/DTA analyses indicate that the precursor melts at 128 °C and starts to decompose at 160 °C. SEM analysis reveals that films deposited above 300 °C have a lamellar morphology while nodular morphology was obtained below 250 °C.
URI: http://hdl.handle.net/10198/1360
ISSN: 0948-1907
Versão do Editor: http://www3.interscience.wiley.com/journal/10003226/home
Appears in Collections:DTQB - Artigos em Revistas Indexados ao ISI

Files in This Item:

File Description SizeFormat
ChemDeposition-7-59-2001.pdf325,67 kBAdobe PDFView/Open
Restrict Access. You can request a copy!
ChemDeposition-7-59-2001 - resumo.pdf93,5 kBAdobe PDFView/Open

Statistics
FacebookTwitterDeliciousLinkedInDiggGoogle BookmarksMySpaceOrkut
Formato BibTex mendeley Endnote Logotipo do DeGóis 

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

 


  © Instituto Politécnico de Bragança - Biblioteca Digital - Feedback - Statistics
  Estamos no RCAAP Governo Português separator Ministério da Educação e Ciência   Fundação para a Ciência e a Tecnologia

Financiado por:

POS_C UE