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The influence of coating fabrication processes in the efficiency of replicated moiré diffraction gratings

dc.contributor.authorRibeiro, J.E.
dc.date.accessioned2014-07-01T15:39:37Z
dc.date.available2014-07-01T15:39:37Z
dc.date.issued2013
dc.description.abstractOne of the most important parameters in the study of diffraction gratings is their optical efficiency. In this paper it is analyzed the different manufacturing processes to cover gratings of Moiré interferometry and its influence on the quality and absolute efficiency of replicated gratings on the surfaces of specimens. The Moiré interferometry is a field measurement technique that has been used in many different fields such as applied mechanics, microelectronics, biomechanics or micromechanics, hence the importance of this study. The applied reflected coating was done by sputtering and aluminium vaporization processes. In this work was analyzed different materials and thicknesses layer. The obtained coatings have a high degree of reflectivity on the replicated gratings.por
dc.identifier.citationRibeiro, J.E. (2013). The influence of coating fabrication processes in the efficiency of replicated Moiré diffraction gratings. Metrology and Measurement Systems. 18:1, p.33-38por
dc.identifier.urihttp://hdl.handle.net/10198/9810
dc.language.isoengpor
dc.peerreviewedyespor
dc.publisherPANpor
dc.subjectDiffraction gratingspor
dc.subjectMoiré interferometrypor
dc.subjectGratings replicationpor
dc.subjectOptical efficiencypor
dc.titleThe influence of coating fabrication processes in the efficiency of replicated moiré diffraction gratingspor
dc.typejournal article
dspace.entity.typePublication
oaire.citation.endPage38por
oaire.citation.issue1por
oaire.citation.startPage33por
oaire.citation.titleMetrology and Measurement Systemspor
oaire.citation.volume18por
person.familyNameRibeiro
person.givenNameJ.E.
person.identifierR-000-6Y8
person.identifier.ciencia-id0F15-FB62-29DB
person.identifier.orcid0000-0001-6300-148X
person.identifier.ridG-3839-2018
person.identifier.scopus-author-id25638652400
rcaap.rightsrestrictedAccesspor
rcaap.typearticlepor
relation.isAuthorOfPublicationc90169e6-7889-4270-a096-35b98c75f9f9
relation.isAuthorOfPublication.latestForDiscoveryc90169e6-7889-4270-a096-35b98c75f9f9

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