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Abstract(s)
One of the most important parameters in the study of diffraction gratings is their optical efficiency. In this paper it is analyzed the different manufacturing processes to cover gratings of Moiré interferometry and its influence on the quality and absolute efficiency of replicated gratings on the surfaces of specimens. The Moiré interferometry is a field measurement technique that has been used in many different fields such as applied mechanics, microelectronics, biomechanics or micromechanics, hence the importance of this study. The applied reflected coating was done by sputtering and aluminium vaporization processes. In this work was analyzed different materials and thicknesses layer. The obtained coatings have a high degree of reflectivity on the replicated gratings.
Description
Keywords
Diffraction gratings Moiré interferometry Gratings replication Optical efficiency
Citation
Ribeiro, J.E. (2013). The influence of coating fabrication processes in the efficiency of replicated Moiré diffraction gratings. Metrology and Measurement Systems. 18:1, p.33-38